Method and structure for forming dielectric isolated finfet with improved source/drain epitaxy

ABSTRACT

Described herein is a FinFET device in which epitaxial layers of semiconductor material are formed in the source/drain regions on dielectrically isolated fin portions. The fin portions are located within a dielectric layer that is deposited on a semiconductor substrate. Surfaces of the fin portions are oriented in the {100} lattice plane of the crystalline material of the fin portions, providing for good epitaxial growth. Further described are methods for forming the FinFET device.

BACKGROUND

Technical Field

The present invention relates to field effect transistors, and moreparticularly to fin-including field effect transistor (FinFET) deviceswith dielectrically isolated crystalline fin surfaces for promotingepitaxial growth in source/drain regions.

Description of the Related Art

Dielectric layers employed in silicon-on-insulator (SOI) FinFET devicesisolate circuitry in a way that is superior to the isolation provided bythe bulk FinFET devices. The punch-through stop doping employed in thebulk FinFET configuration is not as effective in this regard whencompared to the isolation provided by a dielectric layer, e.g., an oxidelayer.

To improve source-drain to channel junction sharpness in a FinFETconfiguration, the fins in a source/drain region are recessed beforeepitaxially growing the in-situ doped source/drain epitaxial layer. Thiscontrasts with bulk FinFET configurations where recessing thesource/drain does not cause an epitaxial layer growth issue. In the bulkFinFET configuration, the remaining fin provides an effective seed layerfor growing a good epitaxial coating on the {100} lattice plane. For SOIFinFET, however, once the fins in the source/drain regions are recessedin the oxide layers, there is no seed layer on which to grow anepitaxial layer. Source/drain epitaxy growth could occur on the finsidewalls, but these surfaces are oriented in the {110} lattice planeand are not well-suited for seeding epitaxial growth. Furthermore, wherethere is no recess, the dopant in the epitaxy layer is further away fromthe fin channel when compared with the recessed case. After a thermalanneal is performed to form the overlap junction between source/drainand gate, the junction has a higher gradient than when not recessed,which degrades device performance.

SUMMARY

According to an embodiment of the present principles, a field effecttransistor (FinFET) device having a dielectric layer (e.g., oxide layer)on a semiconductor substrate layer is described herein. Crystalline finportions that are separate from the semiconductor substrate layer arelocated within a top part of the dielectric layer. The fin portions havea surface oriented in a crystalline plane and are located insource/drain regions of the device. The fin portions are dielectricallyisolated from each other by the dielectric layer. An epitaxial layer ofsemiconductor material is formed on the crystalline fin portions in thesource/drain regions, with the surface of the fins providing a seedsurface for forming the epitaxial layer. A gate structure is presentbetween the source/drain regions.

According to another embodiment of the present principles, described isa method of making a field effect transistor (FinFET) device.Crystalline fins are formed on a semiconductor substrate material, and adielectric layer, e.g., an oxide layer, is deposited on thesemiconductor substrate material to surround the fins. Portions of thefins are protected from oxidation and lower portions of the fins areoxidized to convert same to an oxide material. A part of the dielectriclayer is removed, leaving fin portions within the dielectric layer. Theoxidation protection is removed from the upper portions of the fins andannealing is performed to remove the fins parts above the fin portionsthat are within the dielectric layer. The fin portions within thedielectric layer remain after annealing and are dielectrically isolatedfrom each other by the dielectric layer. Epitaxial layers ofsemiconductor material are formed on seed surfaces of the fin portions,and a gate structure is formed between the source/drain regions.

These and other features and advantages will become apparent from thefollowing detailed description of illustrative embodiments thereof,which is to be read in connection with the accompanying drawings.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The disclosure will provide details in the following description ofpreferred embodiments with reference to the following figures wherein:

FIG. 1 is a cross-sectional view of a FinFET device at an early stage ofdevice fabrication in which fins are formed on a substrate in accordancewith an embodiment of the present principles;

FIG. 2 is a cross-sectional view of a FinFET device at a stage of devicefabrication in which sidewall spacers are formed on the fins and finlength is extended in accordance with an embodiment of the presentprinciples;

FIG. 3 is a cross-sectional view of a FinFET device at a stage of devicefabrication in which a shallow trench isolation material is deposited,and a thermal oxidation is performed to oxidize the lower portion of thefins in accordance with an embodiment of the present principles;

FIG. 4 is a cross-sectional view through a source/drain region of aFinFET device at a stage of device fabrication in which a part of theoxide layer that encapsulates the fins has been removed in accordancewith an embodiment of the present principles;

FIG. 5 is a top plan view of a FinFET device at a stage of devicefabrication in which a sacrificial gate structure and nitride gate capare formed accordance with an embodiment of the present principles;

FIG. 6 is a cross-sectional view along line A-A of FIG. 5 illustrating,in cross-section, the stage of device fabrication of FIG. 5 inaccordance with an embodiment of the present principles;

FIG. 7 is a top plan view of a FinFET device at a stage of devicefabrication in which spacers are created on the sides of the sacrificialgate structure in accordance with an embodiment of the presentprinciples;

FIG. 8 is a cross-sectional view along line A-A of FIG. 7 illustrating,in cross-section, the stage of device fabrication of FIG. 7, parallel tothe gate structure, in accordance with an embodiment of the presentprinciples;

FIG. 9 is a cross-sectional view along line B-B of FIG. 7 illustrating,in cross-section, the stage of device fabrication of FIG. 7, parallel tothe source/drain region, in accordance with an embodiment of the presentprinciples;

FIG. 10 is a simplified cross-sectional view through a source/drainregion of a FinFET device at a stage of device fabrication in which theupper part of the fins have been removed, leaving fin tails within theoxide layer, in accordance with an embodiment of the present principles;

FIG. 11 is a simplified cross-sectional view through a source/drainregion of a FinFET device at a stage of device fabrication in whichepitaxial layers of semiconductor material have been grown on the fintails, in accordance with an embodiment of the present principles;

FIG. 12 is a top plan view of a finished FinFET device, in which thesacrificial gate structure has been replaced, in accordance with anembodiment of the present principles;

FIG. 13 is a cross-sectional view of a finished FinFET device takenalong line A-A of FIG. 12, through the channel region, in accordancewith an embodiment of the present principles;

FIG. 14 is a cross-sectional view of a finished FinFET device takenalong line B-B of FIG. 12, parallel to the source/drain region, inaccordance with an embodiment of the present principles;

FIG. 15 is a cross-sectional view of a finished FinFET device takenalong line C-C of FIG. 12, perpendicular to the gate region, inaccordance with an embodiment of the present principles; and

FIG. 16 is a block flow diagram illustrating an exemplary method ofFinFET device fabrication, in accordance with an embodiment of thepresent principles.

DETAILED DESCRIPTION

According to present principles, a FinFET device is formed in which finsare formed on a semiconductor substrate. The fins are dielectricallyisolated from each other by a dielectric layer. Portions of the fins arethermally oxidized, converting those portions to the dielectric (e.g.,oxide) material. The remaining fin portions have fin tails at theirends. In one embodiment, the fin tails may have a triangular shape at anend.

Before forming an epitaxial layer in the source/drain region, portionsof the fins that remain after thermal oxidation are removed in anannealing process taking place in an annealing atmosphere, leaving thefin tails to remain within the dielectric, e.g., oxide layer. Upper fintail surfaces are at the top of the dielectric layer. The fin tails aredielectrically isolated from each other by the dielectric layer. Thecrystalline top surface of the fin tail lies in the {100} lattice plane.During formation of the source/drain epitaxial layers by growingcrystalline semiconductor material, high quality epitaxy is obtained byusing the surface of the fin tails, which are oriented with the {100}lattice plane, as the seed surface for epitaxial growth. For example,the crystalline semiconductor material grown on the seed surfaces issubstantially defect-free.

In one embodiment, the fin tails are embedded in the dielectric layer,with the upper fin tail surfaces being available for seeding epitaxialgrowth of substantially defect-free crystalline semiconductor material.

It is to be understood that the present invention will be described interms of a given illustrative architecture; however, otherarchitectures, structures, substrate materials and process features andsteps may be varied within the scope of the present invention.

It will also be understood that when an element such as a layer, regionor substrate is referred to as being “on” or “over” another element, itcan be directly on the other element or intervening elements may also bepresent. In contrast, when an element is referred to as being “directlyon” or “directly over” another element, there are no interveningelements present. It will also be understood that when an element isreferred to as being “connected” or “coupled” to another element, it canbe directly connected or coupled to the other element or interveningelements may be present. In contrast, when an element is referred to asbeing “directly connected” or “directly coupled” to another element,there are no intervening elements present.

The present embodiments may include a design for an integrated circuitchip, which may be created in a graphical computer programming language,and stored in a computer storage medium (such as a disk, tape, physicalhard drive, or virtual hard drive such as in a storage access network).If the designer does not fabricate chips or the photolithographic masksused to fabricate chips, the designer may transmit the resulting designby physical means (e.g., by providing a copy of the storage mediumstoring the design) or electronically (e.g., through the Internet) tosuch entities, directly or indirectly. The stored design is thenconverted into the appropriate format (e.g., GDSII) for the fabricationof photolithographic masks, which typically include multiple copies ofthe chip design in question that are to be formed on a wafer. Thephotolithographic masks are utilized to define areas of the wafer(and/or the layers thereon) to be etched or otherwise processed.

Methods as described herein may be used in the fabrication of integratedcircuit chips. The resulting integrated circuit chips can be distributedby the fabricator in raw wafer form (that is, as a single wafer that hasmultiple unpackaged chips), as a bare die, or in a packaged form. In thelatter case the chip is mounted in a single chip package (such as aplastic carrier, with leads that are affixed to a motherboard or otherhigher level carrier) or in a multichip package (such as a ceramiccarrier that has either or both surface interconnections or buriedinterconnections). In any case the chip is then integrated with otherchips, discrete circuit elements, and/or other signal processing devicesas part of either (a) an intermediate product, such as a motherboard, or(b) an end product. The end product can be any product that includesintegrated circuit chips, ranging from toys and other low-endapplications to advanced computer products having a display, a keyboardor other input device, and a central processor.

It should also be understood that material compounds will be describedin terms of listed elements, e.g., SiGe. These compounds includedifferent proportions of the elements within the compound, e.g., SiGeincludes Si_(x)Ge_(1-x) where x is less than or equal to 1, etc. Inaddition, other elements may be included in the compound and stillfunction in accordance with an embodiment of the present principles. Thecompounds with additional elements will be referred to herein as alloys.

Reference in the specification to “one embodiment” or “an embodiment” ofthe present principles, as well as other variations thereof, means thata particular feature, structure, characteristic, and so forth describedin connection with the embodiment is included in at least one embodimentof the present principles. Thus, the appearances of the phrase “in oneembodiment” or “in an embodiment”, as well any other variations,appearing in various places throughout the specification are notnecessarily all referring to the same embodiment.

It is to be appreciated that the use of any of the following “/”,“and/or”, and “at least one of”, for example, in the cases of “A/B”, “Aand/or B” and “at least one of A and B”, is intended to encompass theselection of the first listed option (A) only, or the selection of thesecond listed option (B) only, or the selection of both options (A andB). As a further example, in the cases of “A, B, and/or C” and “at leastone of A, B, and C”, such phrasing is intended to encompass theselection of the first listed option (A) only, or the selection of thesecond listed option (B) only, or the selection of the third listedoption (C) only, or the selection of the first and the second listedoptions (A and B) only, or the selection of the first and third listedoptions (A and C) only, or the selection of the second and third listedoptions (B and C) only, or the selection of all three options (A and Band C). This may be extended, as readily apparent by one of ordinaryskill in this and related arts, for as many items listed.

Referring now to the drawings in which like numerals represent the sameor similar elements and initially to FIG. 1, depicted from theperspective of a semiconductor structure at an early step in forming aFinFET device according to an embodiment of present principles. Fins 14are formed on a semiconductor substrate 12. The semiconductor substrate12 may be made from a semiconductor material such as, silicon, germaniumand silicon-germanium alloy, among other materials and alloys. In thedescribed embodiment according to present principles, the semiconductorsubstrate material is silicon.

Fins 14 are formed on the silicon substrate 12. In one other embodiment,the fins 14 may be formed from the silicon substrate 12 by etching downthrough the substrate layer 12 in a fin-forming pattern. In anotherembodiment, the material for the fins 14 may be grown or otherwisedeposited on the substrate 12 and subsequently etched. In otherembodiments, the fins may be selectively grown on the substrate, e.g.,epitaxially grown in a fin-forming pattern. Other processes for formingthe fins may also be employed. In one embodiment, “fin-forming pattern”refers to a fin-forming arrangement in which the length dimension,extending through the source/drain regions, is the biggest of the threedimensions, e.g., length is bigger than width and height. The fins areprovided with a nitride cap 16 on an upper part of the fins, e.g., asilicon nitride (SiN) cap. The caps may be formed by performing a rapidthermal chemical vapor deposition (RTCVD) of SiN or by performing anequivalent process. In one embodiment, this step is followed by a spaceretch back to complete the caps.

Referring to FIG. 2, spacers 20 are formed by depositing an insulatinglayer on the fins 14. In one embodiment, the spacers are formed from thedeposition of a dielectric material, such as silicon nitride (SiN),followed by a directional etch process such as reactive ion etch (RIE).The fins are then lengthened by performing a selective etch, e.g., suchas by performing reactive ion etching (RIE), or chemical dry etch. As aresult of the substrate etch, the top of surface of substrate 12 islower than that of the substrate 12 in FIG. 1, exposing lower portionsof the fins 14 that are not covered by the spacers 20.

Referring to FIG. 3, a shallow trench isolation material 22, e.g., adielectric material, is deposited on top of the fins 14 to fill thetrenches between fins. Here, the dielectric material 22, which forexample may be an oxide material, is added as a layer at least up to thetop of the fins 14, caps 16 and spacers 20. These steps may be performedin accordance with shallow trench isolation (STI), wherein the trenchesare patterned on the substrate to isolate individual devices, thechannels are etched, filled with a dielectric material, e.g., an oxidematerial such as silicon dioxide, and then the oxide material ispolished by procedure such as chemical mechanical polishing (CMP). Thedeposit of oxide material provides an oxide layer 22 on the substratethat surrounds the fins.

Oxidation is performed on the structure. The oxidation process may be athermal oxidation process. In some embodiments, the oxidation occurs ina furnace set to a temperature in the range of about 900° C. to about1300° C. Oxygen in the furnace diffuses through the shallow trenchisolation region to react with the silicon of substrate 12, forming anoxide region, including the oxide region formed at the base of the fin14, leaving non-oxidized portion of fin 14. Oxide region has a“V-shaped” or “tail” profile, in which the oxide region is higher nearthe exterior of the fin, and lower near the interior of the fin. In thethermal oxidation procedure, lower portions of the fins 14 below thespacers 20 are converted to silicon dioxide (SiO₂). Fin tails 24,extending downward from within the spacers 20, are formed at the bottomsof the fins 14.

Referring to FIG. 4, the shallow trench isolation region (e.g., oxidelayer) 22 is selectively recessed to remove a part thereof thatsurrounds the fins 14. A portion of the shallow trench isolation regionmay remain after the recess. The recessing leaves the fin tails 24within the oxide layer, with the fins protruding upward from theremaining oxide layer. The SiN cap 16 on the top of the fins and thespacers 20 surrounding the fins 14 are removed.

Referring to FIGS. 5 and 6, a sacrificial gate structure 26, to later bereplaced by a metal gate structure, is formed over the fins 14. In oneembodiment, a sacrificial gate oxide 30 is initially deposited aroundthe fins 14. The sacrificial gate structure 26 is then formed bydepositing a material around the sidewalls and the tops of the fins 14(that have been encased in sacrificial gate oxide 30). In oneembodiment, the material of the sacrificial gate is polycrystallinesilicon, and the sacrificial gate formed by a process such a lowpressure chemical vapor deposition (LPCVD). A dielectric cap 28, e.g., anitride cap, is formed over the sacrificial gate structure 26. While thesacrificial gate structure may be formed from polycrystalline silicon,it should be understood that any appropriate material may be used andmay be formed by any appropriate process.

By forming a sacrificial gate structure and later replacing it with ametal gate structure, metal gate structures made of stack materials thatcannot withstand high temperature processing can be employed, since themetal gate structure is formed after completing front-end processingsteps. The sacrificial gate structure defines the geometry of thelater-formed gate structure that functions to switch the device from an“on” to “off” state, and vice versa. A process sequence employing asacrificial gate structure may be referred to as a “gate last” processsequence. Both gate first and gate last process sequences are applicableto the present disclosure.

Referring to FIGS. 7, 8 and 9, spacers 32 are formed on the sides of thesacrificial gate 26. The spacer material may be a nitride such assilicon nitride. The spacers may be formed by performing a rapid thermalchemical vapor deposition (RTCVD) of SiN or an equivalent process. Inone embodiment, this step is followed by a spacer etch back to completethe spacers. FIG. 8 is taken along line A-A of FIG. 7, which extendsthrough the gate and illustrates in cross section the gate structure andthe fins at this stage of the process. FIG. 9 is taken along line B-B ofFIG. 7 and illustrates in cross section the fin tails 24 buried in theoxide layer 22 the substrate 12. Line B-B is positioned in thesource/drain region.

Referring to FIG. 10, an annealing process is employed to remove asubstantial portion of fins while leaving the fin tails 24 in place. Inone embodiment, the annealing process takes place in a hydrogenatmosphere. For example, the annealing may take place in an atmosphereincluding hydrogen gas, e.g., hydrogen gas (H₂) with a mass number ofabout 1, with deuterium gas (²H₂) including deuterium (²H) with a massnumber of about 2, or combinations of hydrogen gas and deuterium gas.Deuterium (D or ²H) is an isotope of hydrogen (H) and is often referredto as heavy hydrogen. The hydrogen anneal may be performed in a hydrogenenvironment at about 500° C. to 1200° C., preferably between about 600°C. and 1100° C., more preferably between about 800° C. and about 950° C.The anneal pressure may be anywhere from about 1 mTorr to about 2000Torr, preferably from about 1 Torr to about 1000 Torr, and morepreferably from about 20 Torr to about 300 Torr. The ambient atmosphereduring the hydrogen anneal in some embodiments is essentially only thehydrogen isotope(s). In another embodiment the atmosphere may includeinert carrier gases, for example, nitrogen, argon, xenon, helium andmixtures thereof. The annealing time varies depending on the pressureand temperature of the process and may be in the range of about 20seconds to 30 minutes. During hydrogen annealing, the exposedsemiconductor fins in the source/drain region react with hydrogen suchas Si+H₂═SiH₂ (silylene), or Si+H₂═SiH₄ (silane). In one embodiment,substantially all of the fin portions are removed, except for the fintails which are within the dielectric layer 22, with the top surfaces ofthe fin tails 24 being oriented in the {100} lattice plane and beingavailable as a seed surface for epitaxial growth of crystallinesemiconductor material, e.g., an epitaxial layer or film deposited on a{100} plane crystal surface will take on a {100} orientation. The topsurfaces of the fin tails oriented in this way provide an effectivesurface for seeding a good source/drain epitaxy.

Referring to FIG. 11, an epitaxial layer 34 of semiconductor material isgrown in the source/drain regions on the crystalline surface of the fintails 24 that are oriented in the {100} lattice plane. The epitaxialgrowth occurs on both sides of the sacrificial gate structure 26. Theterm “epitaxial” denotes that a material is formed using an epitaxialgrowth process. The epitaxial growth material of layer 34 may besilicon, germanium, a silicon-germanium (SiGe) alloy and/or carbon dopedsilicon (Si:C). In the described embodiment, the epitaxial material isSiGe. Good epitaxial growth of a SiGe semiconductor layer has occurredover surfaces of the fin tails in the source drain regions perpendicularand parallel to the fins. The presence of defects in crystal structure(such as dislocations, twins, and stacking faults) are not detected.Such crystalline defects, if present, could interfere with thesemiconductor properties and performance of the final device.

The SiGe layer can be formed, for example, by a selective epitaxialprocess using a combination of silicon-containing gas, agermanium-containing gas, a carrier gas, and optionally, an etchant gas.The silicon containing gas may be a gas such as silane (SiH₄),dichlorosilane (SiH₂Cl₂), disilane (Si₂H₆), trisilane (Si₃H₈) ortetrasilane (Si₄H₁₀). The germanium containing gas may be a gas such asgermane (GeH₄) or digermane (Ge₂H₆). The carrier gas may be a gas suchas nitrogen, hydrogen, or argon. The optional etchant gas may be a gassuch as hydrogen chloride (HCl) or chlorine (Cl₂). The formation mayoccur at a temperature ranging from about 450° C. to about 900° C. TheSiGe layer may have a Ge concentration of about 15% to about 100%,preferably from about 20% to about 60%.

In one embodiment, the epitaxial material may include carbon dopedsilicon with an atomic carbon concentration of between about 0.2% toabout 4.0% (atomic concentration) carbon. In another embodiment theepitaxial material may be silicon. In yet another embodiment theepitaxial material is SiGe with germanium concentration ranges from 15%to 95%. In one embodiment, the epitaxial material is germanium. Theepitaxial material can be in-situ doped (e.g., dopants are incorporatedin the epitaxy material during the epitaxial growth process) and/orex-situ doped (e.g., dopants are incorporated in the epitaxy materialafter epitaxial growth). The doping concentration may range from 1×10¹⁸atoms/cm³ to 2×10²¹ atoms/cm³ and more preferably from 5×10¹⁹ atoms/cm³to 1×10²¹ atoms/cm³. N-type dopants include phosphorus, arsenic, andantimony. P-type dopants include boron, indium, and gallium. Typically,SiGe epitaxy is used as the source/drain for p-type devices and siliconor silicon:carbon (Si:C) epitaxy is used as the source/drain for n-typedevices. Ex-situ doping techniques include but are not limited to: ionimplantation, plasma doping, gas phase doping, solid phase doping,liquid phase doping. Thermal annealing process may be performed fordopant diffusion/activation. The annealing processes include but are notlimited to, laser anneal, flash annealing, rapid thermal annealing. Theremoval of the exposed fin in the source/drain region by hydrogenannealing and the epitaxy growth can be done in the same processchamber.

FIGS. 12, 13, 14 and 15 show the completed FinFET device according topresent principles, in which the sacrificial gate structure 26 isreplaced with metal gate structure 38. FIG. 12 is a top plan view of thecompleted FinFET device 50. FIG. 13 shows the device 50 along line A-Aof FIG. 12, e.g., a cross-sectional view through the (not numbered)channel region passing under the metal gate structure 38. The fins 14may remain as is, e.g., intact, in the channel area under the gates, asthey were protected during the hydrogen annealing by the sacrificialgate structure 26.

The sacrificial gate 26 may be removed by polishing, e.g., CMP, in oneor more polishing steps, employing one or more appropriate slurrycompositions, followed by a wet etch process. Gate structure 38 formedin the channel portion of the device extends over the source/drainepitaxial layers 34 present in the channel. The gate structure 38controls output current, i.e., flow of carriers in the channel portionof the FinFET through electrical or magnetic fields. The channel portionis the region between the source region and the drain region of adevice, e.g., FinFET, that becomes conductive when the device ispowered. The gate structure 38 includes at least one gate dielectric 40that is formed on the channel portion of each fin 14 under the gatestructure, and at least one gate conductor 42 that is formed on the atleast one gate dielectric 40. The gate structure 38 may be formed byforming blanket material layers for the at least one gate dielectric 40and the at least one gate conductor 42 to provide a gate stack, andpatterning and etching the gate stack to provide the gate structure 38.The gate structures 38 can be formed utilizing photolithography and etchprocess steps.

The at least one gate conductor 42 may comprise materials including, butnot limited to metals, metal alloys, metal nitrides and metal silicides,as well as laminates thereof and composites thereof. In someembodiments, gate conductor 42 may be comprised of a metal such astitanium nitride (TiN) or ruthenium (Ru) for a pFET, or titaniumaluminum (TiAl), aluminum nitride (AlN) or tantalum carbide (TaC) for anFET. The gate structure 38 may be formed by blanket depositing thematerial layers for the at least one gate dielectric 40, and the atleast one gate conductor 42 to provide a gate stack, followed by achemical planar polishing (CMP) step to form the gate structure 38.

The high dielectric constant (high-k) material 40 is deposited aroundthe metal gate as a gate insulating material. In one embodiment, thehigh-k dielectric layer 40 is composed of a high-k oxide, such as, forexample, HfO₂, ZrO₂, Al₂O₃, TiO₂, La₂O₃, SrTiO₃, LaAlO₃, Y₂O₃ andmixtures thereof. Other examples of high-k dielectric materials fordielectric layer 40 include hafnium silicate, hafnium silicon oxynitrideor combinations thereof.

In one embodiment, the at least one first gate dielectric may bedeposited by chemical vapor deposition (CVD). Variations of CVDprocesses suitable for depositing the at least one first gate dielectriclayer include, but are not limited to atmospheric pressure chemicalvapor deposition (APCVD), low pressure chemical vapor deposition(LPCVD), plasma enhanced chemical vapor deposition (PECVD), metalorganic chemical vapor deposition (MOCVD), atomic layer deposition(ALD), and combinations thereof. In one embodiment, the thickness of theat least one first gate dielectric layer 40 is greater than 0.8 nm. Moretypically, the at least one first gate dielectric layer 40 has athickness ranging from about 1.0 nm to about 6.0 nm.

The high-k dielectric materials reduce leakage current significantly(e.g., by 100×). High-k gate dielectrics can have a greater thicknessthan, for example, SiO₂. Use of metal gates with appropriate workfunctions can provide the proper threshold voltages (V_(t)) andsignificantly reduce channel mobility degradation. With the combinationof high-k gate dielectrics and metal gates, the transistor performancecan be significantly improved, and scaling below ˜50 nm becomespossible.

The advantage of this approach to forming the gate structure, e.g.,first forming a sacrificial gate structure that will be replaced by ametal gate structure is that metal gate structures with stack materialsthat cannot withstand high temperature processing are better off beingfabricated after the front-end processing steps are completed. Ascontemplated, sacrificial polycrystalline silicon gates are fabricatedfirst and then replaced with metal gates, e.g., a replacement metalgate.

As shown in FIGS. 12, 13, 14 and 15, a low-k inter-layer dielectric(ILD) material 44 is deposited to separate closely-spaced interconnectlines arranged in the levels of the device. As shown in FIG. 15, takenalong line C-C of FIG. 12, and perpendicular to the gate material, theILD material 44 extends above the source-drain epitaxial material.

The material for the ILD may be selected from the group consisting ofsilicon containing materials such as SiO₂, Si₃N₄, SiO_(x)N_(y), SiC,SiCO, SiCOH, and SiCH compounds, the above-mentioned silicon containingmaterials with some or all of the Si replaced by Ge, carbon dopedoxides, inorganic oxides, inorganic polymers, hybrid polymers, organicpolymers such as polyamides or SiLK™, other carbon containing materials,organo-inorganic materials such as spin-on glasses andsilsesquioxane-based materials, and diamond-like carbon (DLC), alsoknown as amorphous hydrogenated carbon, α-C:H). Additional choices forthe ILD material include any of the aforementioned materials in porousform, or in a form that changes during processing to or from beingporous and/or permeable to being non-porous and/or non-permeable.

FIG. 16 is a block flow diagram demonstrating a method 100 for forming aFinFET device with good epitaxial growth in the source/drain regions inaccordance with an embodiment of the present principles. In somealternative embodiments, the items noted in the blocks may occur out ofthe order given in the flow diagram. For example, two blocks shown insuccession may, in fact, be executed substantially concurrently, or theblocks may sometimes be executed in the reverse order, depending uponthe functionality involved. It will also be noted that each block of theblock diagrams and/or flowchart illustration, and combinations of blocksin the block diagrams and/or flowchart illustration, can be implementedby special purpose hardware-based systems that perform the specifiedfunctions or acts or carry out combinations of special purpose hardwareand computer instructions.

In block 110, fins are formed on a substrate material, e.g., a siliconsubstrate material. Fin formation may be effected by forming the finsout of the substrate material, such as by etching in a fin-formingpattern, or by another approach such as epitaxially growing the fins onthe substrate.

In block 120, spacers are formed on sidewalls of the fins and caps areformed on the top of the fins. Fin length is extended, e.g., byperforming an etch-down on the substrate.

In block 130, trenches are formed on the surface of the Si substrate toisolate active areas. A dielectric layer, e.g., an oxide layer, isdeposited to at least the tops of the fins, and chemical mechanicalpolishing (CMP) is performed. These steps may be performed in accordancewith the STI technique.

In block 140, thermal oxidation is performed to oxidize the exposed finbottoms. Upper portions of the fins that encased within the spacers andcaps are preserved. The oxidation process forms fin tails on the bottomsof the fins.

In block 150, the dielectric layer, e.g., the oxide layer, isselectively removed to expose the fin portions above the fin tails. Thecaps and spacers are removed from the fins.

In block 160, a sacrificial gate structure is formed, e.g., apolycrystalline silicon sacrificial gate structure is formed.

In block 170, spacers are formed on the side of the sacrificial gatestructure.

In block 180, hydrogen annealing is performed, which removes the upperportions of the fins, leaving the fin tails intact and located withinthe dielectric layer. Individual fin tails are dielectrically isolatedfrom each other in the dielectric layer.

In block 190, epitaxial layers are grown in the source/drain region onthe crystalline fin tip surfaces oriented in the {100} lattice plane.The growth may be crystalline SeGe semiconductor material or anothersuitable semiconductor material.

In block 200, the sacrificial gate structure is removed and replacedwith a metal gate structure. The sacrificial gate may be removed bypolishing, e.g., CMP, in one or more polishing steps, employing one ormore appropriate slurry compositions. The metal gate that replaces thesacrificial gate may be constructed of metals, metal alloys, metalnitrides and metal silicides, as well as laminates thereof andcomposites thereof. Further, a high-k dielectric material is depositedaround the metal gate. Exemplary materials suited for use as the high-kdielectric material are zirconium oxide and hafnium oxide. The metalgate is connected to the device with a gate electrode contact.

In block 210, any further steps, if necessary are performed to completethe FinFET device. For example, an inter-layer dielectric (ILD) may bedeposited to separate closely-spaced interconnect lines arranged in thelevels of the device. The ILD material has a low dielectric constant k.e.g., as close to 1 as possible, in order to minimize capacitivecoupling (“cross talk”) between adjacent metal lines. Furthermore, anyother electrical contacts are established, to the extent they have notbeen established previously.

The structure of the FinFET devices with improved source/drain epitaxyand methods for forming same in accordance with embodiments of thepresent principles offer several advantages and improvements. Forexample:

The isolation of the fins and epitaxial layers grown on the fin tailsprovides excellent isolation of device circuitry, similar to a SOIFinFET device. Also, the surface of the crystalline fin tails, orientedin the {100} lattice plane, provides an excellent seed surface forepitaxial growth, similar to bulk FinFET. The epitaxial layers are shownto be highly crystalline and free of defects that could adversely affectdevice performance.

According to present principles, the FinFET device and method forforming same provide isolation of circuitry associated with SOI FinFETdevices while also possessing features that promote good epitaxialgrowth found in bulk FinFET devices.

Throughout this disclosure oxide, nitride and polycrystalline siliconmaterials are described. However, these materials are illustrative andother materials are also contemplated and within the scope of theinvention. In addition, dimensions of thicknesses are describedthroughout this disclosure. These thickness dimensions are illustrativeand other dimensions may be employed in accordance with embodiments ofthe present principles.

Having described preferred embodiments for a method and structure forforming dielectric isolated FinFET with improved source/drain epitaxy(which are intended to be illustrative and not limiting), it is notedthat modifications and variations can be made by persons skilled in theart in light of the above teachings. It is therefore to be understoodthat changes may be made in the particular embodiments disclosed whichare within the scope of the invention as outlined by the appendedclaims. Having thus described aspects of the invention, with the detailsand particularity required by the patent laws, what is claimed anddesired protected by Letters Patent is set forth in the appended claims.

What is claimed is:
 1. A method for forming a field effect transistor(FinFET) device, comprising: forming fins on a semiconductor substratematerial, wherein the fins are a crystalline material; depositing adielectric layer on the semiconductor substrate material to surround thefins; applying an oxidation protection material to top portions of thefins and oxidizing lower portions of the fins to convert same to anoxide material; removing a dielectric layer portion to leave finportions within the dielectric layer; removing the oxidation protectionmaterial from the upper portions of the fins; annealing to remove thefins above the fin portions within the dielectric layer, the finportions within the dielectric layer being dielectrically isolated fromeach other by the dielectric layer; forming, in source/drain regions,epitaxial layers of semiconductor material on seed surfaces of the finportions that are within the dielectric layer; and forming a gatestructure between the source/drain regions.
 2. The method of claim 1,wherein the fins are formed out of the semiconductor substrate materialby selectively removing material from the semiconductor substrate layerin a fin-forming pattern.
 3. The method of claim 1, wherein theannealing is conducted in an atmosphere comprising a hydrogen gasselected from hydrogen, deuterium and a combination of hydrogen anddeuterium.
 4. The method of claim 1, wherein the seed surfaces of thefin portions are oriented in the {100} lattice plane.
 5. The method ofclaim 1, wherein the forming of the gate structure comprises forming asacrificial gate structure on the device prior to annealing; andreplacing the sacrificial gate structure with a metal gate structureafter forming the epitaxial layers of semiconductor material.
 6. Themethod of claim 5, further comprising forming an insulating layercomprising a high dielectric constant material around the metal gatestructure.
 7. A method for forming a field effect transistor (FinFET)device, comprising: providing a crystalline semiconductor substratematerial; forming fins from the crystalline semiconductor substratematerial; applying an oxidation protection material to top portions ofthe fins; depositing a dielectric layer on the crystalline semiconductorsubstrate material to enclose the fins; oxidizing lower portions of thefins, converting same into fin tails; removing a top portion of thedielectric layer, exposing upper fin parts extending from the fin tailsand leaving fin tails within the dielectric layer; removing theoxidation protection material from the upper fin parts; forming asacrificial gate structure between the source/drain regions; annealingto remove the upper fin parts, the fin tails being left within thedielectric layer, the fin tails being dielectrically isolated from eachother by the dielectric layer; forming, in source/drain regions,epitaxial layers of semiconductor material on seed surfaces of the fintails; and replacing the sacrificial gate structure with a metal gatestructure.
 8. The method of claim 7, wherein the annealing is conductedin an atmosphere comprising a hydrogen gas selected from hydrogen,deuterium and a combination of hydrogen and deuterium.
 9. The method ofclaim 7, wherein the seed surfaces of the fin tails are oriented in the{100} lattice plane.
 10. The method of claim 7, further comprisingforming an insulating layer comprising a high dielectric constantmaterial around the metal gate structure.